The RC 6 chemistry-HYBRID pump is a combination of a two-stage rotary vane pump and a two-stage chemistry diaphragm pump for optimized corrosion resistance. The diaphragm pump maintains the oil reservoir under vacuum in order to keep the partial pressures of solvent vapors at levels below their condensation points and to reduce largely the concentration of oxygen and corrosive gases. Therefore the RC 6 chemistry-HYBRID pump has a much higher solvent vapor pumping capability and resistance to aggressive gases than conventional rotary vane pumps. The RC 6 chemistry-HYBRID pump is a combination of a two-stage rotary vane pump and a two-stage chemistry diaphragm pump for optimized corrosion resistance. The diaphragm pump maintains the oil reservoir under vacuum in order to keep the partial pressures of solvent vapors at levels below their condensation points and to reduce largely the concentration of oxygen and corrosive gases. Therefore the RC 6 chemistry-HYBRID pump has a much higher solvent vapor pumping capability and resistance to aggressive gases than conventional rotary vane pumps.